ELECTROMAGNETIC BASED CMOS-MEMS ENERGY HARVESTING SYSTEM

An Electromagnetic Based CMOS-MEMS Energy Harvesting System can
convert kinetic energy which comes from vibration into electrical power. Energy
harvesting technique is very promising because no changing batteries or setting cable
and wires. Kinetic energy present in various form such as vibrations, random
displacements also force can be harvested into electrical energy by using
electromagnetic mechanisms. Electromagnetic is suitable since it is more precise, energy
efficient, extremely powerful and easier to maintain. Power is generated by means of
electromagnetic transduction between a moving coil construct on a CMOS-MEMS
structure and a static magnet placed between it. It mainly consists of a proof mass, thin
film, coil and also a permanent magnet. Simulation shows that the line width and the
turns of coil influence the efficiency of the induced voltage. Acceleration also play
important role because higher acceleration give higher frequency and result in
increasing the change of magnetic flux rate in the coil and yield in higher output voltage
according to Faraday's Law. The mechanical characteristics are being simulated by
using engineering software, CoventorWare. The sensitivity of the structure achieved
from the simulation is 7.938xlo·6 V/g at 1.5 Tesla.