Performance Analysis and Calibration of a Novel CMOS-MEMS Humidity Sensor

This Study presents calibration and performance analysis of a novel CMOSMEMS
humidity sensor that is fabricated using 0.35 μm CMOS technology with
embedded micro-heater operates at high temperature, temperature sensor and
piezoresistors for the purpose of relative humidity measurements. The device has been
fabricated yet to be analyzed and assessed on its performance to elevate the
understanding of the device performance. This study also focuses on the study of the
device response to humidity under different conditions of factors that affect the device
measurements for relative humidity such as, temperature and frequency, in addition to
the identification of the frequencies that is humidity sensitive and responding well. The
device response to humidity that is done to identify the best linear results of relative
humidity measurements in relation with the output voltage of Wheatstone quarter
bridge read-out circuit of the device. This experimental research have been conducted
beginning with device electrical properties, device operating temperature analysis,
dynamic response of the device to identify the humidity sensitive signal of the device,
and the study of device response to humidity.