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CMOS-MEMS PIEZOELECTRIC ENERGY HARVESTING SYSTEM

SUHAIDIN, SITI NURHAKMI (2011) CMOS-MEMS PIEZOELECTRIC ENERGY HARVESTING SYSTEM. Universiti Teknologi Petronas. (Unpublished)

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Abstract

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoelectric energy harvester with large proof mass. Piezoelectric has known to be the best in harvesting ambient vibration energy. Its simple theory to produce voltage with stress and vibration has come to many optimization researches to produce the best structure with low natural frequency and high yield strength. Four common materials have been compared to see the performance of generating the voltage output. Zinc Oxide, ZnO thin film was utilized as the best piezoelectric material and device was designed using the infamous cantilevered-beam structure which known as the best structure to produce high sensitivity of vibration and has the highest stress effect at the beam tip attached to the stator comb or fixed end. This structure is indeed compatible with CMOS-MEMS fabrication. The structure has been designed and simulated. The device has a sensitivity of I 13.4 J!VIg and the structure has been carefully optimized to avoid structured damage due to undesired mode by incorporating the parallel beam to the cantilever-based structure.

Item Type: Final Year Project
Academic Subject : Academic Department - Electrical And Electronics - Pervasisve Systems - Digital Electronics - Prototyping
Subject: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Engineering > Electrical and Electronic
Depositing User: Users 2053 not found.
Date Deposited: 27 Sep 2013 11:06
Last Modified: 25 Jan 2017 09:42
URI: http://utpedia.utp.edu.my/id/eprint/7005

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