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Downscaling of 0.35 J.lm to 0.25 J.lm CMOS Transistor by Simulation

OTHMAN, NORAINI (2006) Downscaling of 0.35 J.lm to 0.25 J.lm CMOS Transistor by Simulation. Masters thesis, Universiti Teknologi Petronas.

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Silicon (Si) based integrated circuit (IC) has become the backbone of today's semiconductor world with MOS transistors as its fundamental building blocks. The integrated circuit complexity has moved from the early small-scale integration (SSI) to ultra-large-scale integration (ULSI) that can accommodate millions of transistors on a single chip. This evolution is primarily attributed to the concept of device miniaturization. The resulting scaledown devices do not only improve the packing density but also exhibit enhanced performance in terms of faster switching speed and lower power dissipation. The objective of this work is to perform downscaling of 0.35 Jll11 to 0.25 Jll11 CMOS transistor using Silvaco 2-D ATHENA and ATLAS simulation tool. A "two-step design" approach is proposed in this work to study the feasibility of miniaturization process by scaling method. A scaling factor, K of 1.4 (derived from direct division of 0.35 with 0.25) is adopted for selected parameters. The first design step involves a conversion of the physical data of 0.35 Jll11 CMOS technology to the simulated environment, where process recipe acquired from UC Berkeley Microfabrication Lab serves as the design basis. The electrical data for the simulated structure of 0.35 11m CMOS was extracted with the use of the device simulator. Using the simulated, optimized 0.35 Jll11 structure, downscaling to a smaller geometry of 0.25 Jll11 CMOS transistor was carried out and subsequent electrical characterization was performed in order to evaluate its performance. Parameters that are monitored to evaluate the performance of the designed 0.25 Jll11 CMOS transistor include threshold voltage (VtJJ, saturation current (ldsaJ, off-state leakage current (Ion) and subthreshold swing (SJ. From the simulation, the V1h obtained is of 0.51 V and -0.4 V for NMOS and PMOS respectively, with a difference of 15%-33% as compared to other reported work. However, for results of Idsat. the values obtained which is of 296 ~-tAIJll11 for NMOS and 181 J.lA/Jll11 for PMOS is much lower than other reported work by 28%-50%. This is believed to be due to direct scaling of 0.25 Jll11 transistor from the 0.35 11m geometry without alterations on the existing structure. For Ioffand St. both results show a much better value as compared to other work. I off obtained which is of <1 0 pA/J.lm is about 80%-96% lower than the maximum allowable specification. As for S1, the values obtained which is <90 mY/dec is only within 5% differences as compared to specification. In overall, these results (except for Idsat) accepted values for the particular 0.25 J..Lm technology. From this work, the capability to perform device miniaturization from 0.35 J..Lffi to 0.25 J..Lffi has been developed. This is achieved by acquiring the technical know-how on the important aspects of simulation required for successful simulation of 0.35 J..Lffi technology. Ultimately, the outcome of this work which is a simulated 0.25 J..Lm CMOS transistor can be used as a basis for scaling down to a much smaller device, namely towards 90-nrn geometry.

Item Type: Thesis (Masters)
Academic Subject : Academic Department - Electrical And Electronics - Pervasisve Systems - Digital Electronics - Design
Subject: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Engineering > Electrical and Electronic
Depositing User: Users 2053 not found.
Date Deposited: 30 Sep 2013 16:55
Last Modified: 25 Jan 2017 09:46
URI: http://utpedia.utp.edu.my/id/eprint/8043

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