DOWNSCALING OF 0.25uM TO O.13uM NMOS USING SILVACO SOFTWARE WITH DIFFERENT SUBMICRON TECHNOLOGY

For the last three decades, MOS device technologies have been improved due to
downscaling. It consumes less power, have shorter delay and occupy less space. The
CMOS comprises of p-type and n-type, has become the main growth of
miniaturization microelectronics industry. In this project, ATHENA andATLAS are
simulators used with the objective to downscale 0.25um to 0.13um NMOS using two
different recipes and to obtain its electrical characteristic. Ascaling factor, a of 1.923
is utilized. Three factors are investigated; the gate length (Lg), gate oxide thickness
(U) and threshold voltage (Vth) adjust implant. The parameters evaluated include W,
Vth and saturation current (WO as well as ID-VD, Id-Vg and subthreshold current (St)
curve. After downscaling to 0.13um, both recipes haveWvalues of3.36nm while the
Vth obtain are 0.31V and 0.37V respectively. The W value is 343uA/um and
519uA/um while the St is 65mV/dec and 128mV/dec respectively. Each recipe has its
own drawback. First recipe has lower Id^ and lower St while second recipe has
higher IDsat and higher St Higher W means the device can perform at taster speed
while lower St. shows the device has good turn-off characteristics. Overall, the
electrical parameters obtained are agreeable with ITRS requirement and other
reported works except for the result ofW This could be due to the direct scaling.
Other parameters such as St could not be compared as itis confidential to the public.