Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate

Chew, Soon Aik (2003) Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate. Masters thesis, Universiti Teknologi Petronas.

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2003 - Optimization of Rapid Thermal Processing in 0.13 Micron CMOS Poly Silicon Gate.pdf

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Item Type: Thesis (Masters)
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Departments / MOR / COE: Engineering > Electrical and Electronic
Depositing User: Users 2053 not found.
Date Deposited: 26 Sep 2013 13:24
Last Modified: 25 Jan 2017 09:47
URI: http://utpedia.utp.edu.my/id/eprint/6825

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