DEVELOPMENT OF INTERFACE CIRCUIT FOR MICROELECTROMECHANICAL SYSTEM (MEMS) SENSOR

The Micro-Electro-Mechanical-System (MEMS) is a technology of a microscopic size devices. It merge the miniature mechanical and the electromechanical elements. It have a mechanical functionality and convert a measured mechanical signal into an electrical signal. From the MEMS sensor, it need an interface circuit for the signal to be able to process a signal straight from the MEMS sensor. The interface circuit also known as the front-end circuit and read-out circuit. The interface circuit have two approach in manufacturing. First, is the monolithic approach and second is the hybrid approach. The monolithic approach is by manufacturing the sensor and the interface circuit together and hybrid approach is by manufacturing the sensor and the interface circuit separately. Both of the approach have their pros and cons that will be explained in the literature review. After choosing the approach type, the circuit topology then been chosen. To decide which topology to be used, the specification of the interface circuit and the availability of the technology is considered. The topology of the interface circuit is justified in the literature review. Then the circuit has been design and simulated using the CADENCE tools. The circuit will be redesign until the specification meets the requirement.