Life Cycle Asessment Study On Complementary Metal Oxide Semiconductor Chip Under Etch Module

Subramaniam, Keerthana (2024) Life Cycle Asessment Study On Complementary Metal Oxide Semiconductor Chip Under Etch Module. Masters thesis, UNIVERSITI TEKNOLOGI PETRONAS.

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Item Type:	Thesis (Masters)
Subjects:	T Technology > T Technology (General)
Departments / MOR / COE:	Engineering
Depositing User:	Mr M Fadzly Aziz
Date Deposited:	07 Mar 2025 09:20
Last Modified:	07 Mar 2025 09:20
URI:	http://utpedia.utp.edu.my/id/eprint/31250

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