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Control of Undesirable Modal Vibrations of a MEMS-Based Microcantilever with Piezoelectric Actuator

ZULKARNAIN, NUR F ATIN (2011) Control of Undesirable Modal Vibrations of a MEMS-Based Microcantilever with Piezoelectric Actuator. Universiti Teknologi PETRONAS. (Unpublished)

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Abstract

The project proposes that the undesirable modal of a MEMS-based-micro-cantilever can be controlled with the existence of piezoelectric actuator. By adding a piezoelectric layer, which is PZT at the near end of the fixed micro-cantilever beam, we are able to eliminate the unwanted vibrations of the micro-cantilever, and so that the cantilever will deflect accordingly to the desired mode of vibration. The design and the lumped parameter modeling of the micro-cantilever are derived in order to obtain its axial and bending resonant frequency. Thus this will enables the first modal frequency to be obtained. Simulations by using CoventorWare are included in this project in order to further display the design scheme.

Item Type: Final Year Project
Academic Subject : Academic Department - Electrical And Electronics - Power Electronics - Power Electronics - Control Devices
Subject: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Engineering > Electrical and Electronic
Depositing User: Users 2053 not found.
Date Deposited: 06 Nov 2013 14:13
Last Modified: 25 Jan 2017 09:42
URI: http://utpedia.utp.edu.my/id/eprint/10204

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