Control of Undesirable Modal Vibrations of a MEMS-Based Microcantilever with Piezoelectric Actuator

The project proposes that the undesirable modal of a MEMS-based-micro-cantilever
can be controlled with the existence of piezoelectric actuator. By adding a
piezoelectric layer, which is PZT at the near end of the fixed micro-cantilever beam,
we are able to eliminate the unwanted vibrations of the micro-cantilever, and so that
the cantilever will deflect accordingly to the desired mode of vibration. The design
and the lumped parameter modeling of the micro-cantilever are derived in order to
obtain its axial and bending resonant frequency. Thus this will enables the first modal
frequency to be obtained. Simulations by using CoventorWare are included in this
project in order to further display the design scheme.